Motorized X/XY Stage

XA07F-R2

Price(JPY)
¥ 150,000
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Drawings file
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Remarks and Features

Please, prepare the cable for ten (10) lead motor.
Specification (Mechanical)
Model NumberXA07F-R2
Mirror Model NumberXA07F-R2-R
Table Size70mm×70mm
Guide MechanismCross-Roller Guide
Motion Range±10mm
Lead MechanismBall Screw, Lead 1.0mm
Resolution Full/Half Step1μm/0.5μm
Resolution Micro Step (1/20 div)0.05μm
Maximum Speed5mm/sec
Accumulated Lead Error≦5μm/20mm
Repeatability≦±0.2μm
Lost Motion≦0.5μm
Straightness (Horizontal)≦0.5μm/20mm
Straightness (Vertical)≦1μm/20mm
Backlash≦0.2μm
Moment Load Stiffness0.05 arcsec/N・cm
Load Capacity98N (10kgf)
MaterialSteel
FinishingNickel Plating
Weight1.2kg
Perpendicularity
Specification (Electrical)
Standard MotorFive (5) phase stepper motor (Oriental Motor: PX533MH-B) Phase Current 0.75A, Basic Step Angle 0.36°
Standard Connector20Pin Round (Hirose: RP13A-12RA-20PC)
Sensor ModelJH
Options/Accessories
Vacuumup to "ultra heigh vacuum" (UHV), contact us.
Clean room-C Lubricant exchange
Mirror Symmetrysee technical for possibilities, contact us
Motor handleto manually move the stage
Motor typenearly any motor type can be mounted, contact us.
Connector typeexchange to DSub 15 connector, contact us.
Limitdifferent types of optical/mechanical, contact us.
EncoderLinear encoders (up to 50nm), contact us.
Adaptersmount stages together. contact us.**
CustomizationAnything you need? contact us.**
Overhaul Price
¥ 42,000~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number) ¥ 30,000
Vacuum Lubricant Change Price ("-V" at the end of model number) ¥ 30,000
Motor Change Option
Same Size Motor Change Price ¥ 12,000~
Different Size Motor Change Price ¥ 30,000~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Motorized X/XY Stage