Motorized X/XY Stage

XA16A-R2

Price(JPY)
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Remarks and Features

Specification (Mechanical)
Model NumberXA16A-R2
Mirror Model NumberXA16A-R2-R
Table Size160mm×124mm
Guide MechanismCross-Roller Bearing
Motion Range±25mm
Lead MechanismBall Screw, Lead 2.0mm
Resolution Full/Half Step2μm/step (Half Step)
Maximum Speed20mm/sec
Accumulated Lead Error10μm/50mm
Repeatability±0.2μm
Lost Motion2μm
Backlash0.5μm
Moment Load Stiffness0.1 arcsec/kgf-cm, Roll Direction
Load Capacity30kg
MaterialAluminum Alloy
FinishingClear-Matt Anodizing
Weight4kg
Specification (Electrical)
Standard MotorFive (5) phase stepper motor (Oriental Motor) (PK566-B)
Standard ConnectorP-1620BA, P-1620A-STA (Hirose)
Options/Accessories
Vacuumup to "ultra heigh vacuum" (UHV), contact us.
Clean room-C Lubricant exchange
Mirror Symmetrysee technical for possibilities, contact us
Motor handleto manually move the stage
Motor typenearly any motor type can be mounted, contact us.
Connector typeexchange to DSub 15 connector, contact us.
Limitdifferent types of optical/mechanical, contact us.
EncoderLinear encoders (up to 50nm), contact us.
Adaptersmount stages together. contact us.**
CustomizationAnything you need? contact us.**
Overhaul Price
~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number) ¥ 48,000
Vacuum Lubricant Change Price ("-V" at the end of model number) ¥ 48,000
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Motorized X/XY Stage