Motorized X/XY Stage

XA10A-L201

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Remarks and Features

Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available. [Model] XA10A-L201-BM (Additional Cost¥40,000)
Note: 2 phase stepper motor specifications change connector.
Specification (Mechanical)
Model NumberXA10A-L201
Mirror Model NumberXA10A-L201-R
Table Size100mm×100mm
Guide MechanismLinear Guide
Motion Range± 50mm
Lead MechanismBall Screw, Lead 2.0mm
Resolution Full/Half Step 4μm/2μm
Resolution Micro Step (1/20 div)0.2μm
Maximum Speed20mm/sec ※When using a driver with an input power supply of 100 VAC specifications
Accumulated Lead Error≦ 8μm/100mm (AVE. 3.51μm/100mm)
Repeatability≦±0.5μm (AVE. ±0.08μm)
Lost Motion≦ 2μm (AVE. 1.15μm)
Straightness (Horizontal)≦ 3μm/100mm (AVE. 0.86μm/100mm)
Straightness (Vertical)≦ 2μm/100mm (AVE. 0.74μm/100mm)
Backlash≦1μm (AVE. 0.13μm)
Moment Load Stiffness0.05 arcsec/N・cm (AVE. 0.01 arcsec/N・cm)
Load Capacity 196N (20kgf)
MaterialAluminum Alloy
FinishingClear-Matt Anodizing
Weight 3.8kg
Perpendicularity-
Specification (Electrical)
Standard Motor5 phase stepper motor (Oriental motor:C087Q-9215P)
2 phase stepper motor (Oriental motor:PK264JDB)
Motor shaft diameter:Φ8mm
Conformance option handle: B type
Standard Connector5 phase stepper motor:20Pin Round
(Hirose:RP13A-12RA-20PC)
2 phase stepper motor:20Pin Rectangular
(Hirose:PC-1620,P-1620A-STA)
Sensor ModelF104(LIMIT), F105(HOME)
Overhaul Price
~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Motorized X/XY Stage