Vacuum X/XY Stage
MVXA10A-L201
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| Drawings file |
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| Drawing For Download |
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| Connect Fig File |
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Remarks and Features
Specification (Mechanical)
| Model Number | MVXA10A-L201 |
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| Table Size | 100mm×100mm |
| Guide Mechanism | Linear Guide |
| Motion Range | ±50mm |
| Lead Mechanism | Ball Screw, Lead 2.0mm |
| Resolution Full/Half Step | 4μm/2μm |
| Resolution Micro Step (1/20 div) | 0.2μm |
| Maximum Speed | 10mm/sec |
| Accumulated Lead Error | ≦15μm/100mm |
| Repeatability | ≦±0.5μm |
| Lost Motion | ≦2μm |
| Straightness (Horizontal) | ≦3μm/100mm |
| Straightness (Vertical) | ≦3μm/100mm |
| Backlash | ≦2μm |
| Moment Load Stiffness | 0.05 arcsec/N・cm |
| Load Capacity | 196N (20kgf) |
| Material | Aluminum Alloy |
| Weight | 3.5kg |
Specification (Electrical)
| Standard Motor | Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72° |
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| Standard Connector | Vacuum D-Sub 9Pin |
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| Lubricant Change Option | |
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| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
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| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
Vacuum X/XY Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Custom-made units
- Product Comparing
- Control Electronics
- Accessories