Vacuum Z Stage(Vertical Stage)

MVZA07A-W2C

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Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

Specification (Mechanical)
Model NumberMVZA07A-W2C
Table Size70mm×70mm
Guide MechanismCross-Roller Guide
Motion Range±2.5mm
Lead Mechanism1/4-Wedge, Ball Screw, Lead 1.0mm
Resolution Full/Half Step0.5μm/0.25μm
Resolution Micro Step (1/20 div)0.025μm
Maximum Speed1.25mm/sec(5kpps,Half時)
Repeatability≦±0.5μm
Lost Motion≦0.5μm
Verticalness≦8μm/5mm
Load Capacity49N (5kgf)
MaterialAluminum Alloy
Weight1.3kg
Specification (Electrical)
Standard MotorFive(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Standard ConnectorVacuum D-Sub 9Pin
Overhaul Price
~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price

Information

Stages are inspected in air and are not suitable for baking. Please contact Sales for information on bakable stages.

Link to Technical informaiton of Vacuum Compatible Stage

Vacuum Z Stage