Compact 6-axis Manipulator USM Series


Ultra-Compact 6-Axis Manipulator

The new KOHZU 6-Axis Manipulator is a culminationof our extensive expertise in production and analysis equipment.

◦Size and weight have been reduced while maintaining high accuracy and rigidity!
◦High precision ball screw drives for all axes ensure a long performance life!

1. Centralized Connector Unit

The 6-axis motor and sensor wiring are concentrated in one location to make even complicated multi-axis wiring work easy (can also be removed if not needed).


2. Compact and Lightweight

Lightweight design (approx.3kg) enables installation on highspeed carrier shafts.


3. High Tracking

Positioning i s completed according to highly accurate commands thanks to tracking in sub-micron units for straight lines or within seconds for angles.
Example: The graph below shows tracking data for one pulse of the swivel stage. Error is within ±0.0002 degrees for 0.000797 degrees.



Axis Motion Range Max Speed Minimum Resoluton Micro-Step(div)
X ±3mm 10mm/sec 0.1μm 1/20
Y ±3mm 10mm/sec 0.1μm 1/20
Z ±1.5mm 2.5mm/sec 0.25μm 1/2
θ ±3° 12.7°/sec 0.00127° 1/2
α ±3° 9.6°/sec 約0.00064° 1/2
β ±3° 12°/sec 約0.00079° 1/2

※Minimum resolution can be changed according to the number of driver divisions.

Dimension (Click enlarge the picture)



(Click enlarge the PDF)

USM series