Positioning Stages
【 Montblanc Series 】
XM10F-C3-CL
Specification (Mechanical)
Model Number
XM10F-C3-CL
Mirror Model Number
XM10F-C3-R-CL
Table Size
100mm×100mm
Guide Mechanism
Cross Roller Guide
Actuator
Fine Pitch Positioner FPP03-13(13mm)
Motion Range
Coarse 13mm, Fine0.3mm
Minimum Readout
Coarse 10μm/div, Fine 0.5μm/div
Straightness
≦1.5μm/13mm
Moment Load Stiffness
0.04 arcsec/N cm
Load Capacity
196N (20kgf)
Material
Steel
Finishing
Nickel Plating
Weight
1.6kg
Overhaul Price
ASK
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
ASK
Vacuum Lubricant Change Price ("-V" at the end of model number)
ASK
Remarks and Features
●Manual X stage with precision crossed roller guides.
●The body material is Steel with a Nickel Plating finish.
●The center-press type is superior in ease of use.
●Manual XY stage with precision crossed roller guides.
●The FPP03-13 is a sub-micron micrometer head uniquely designed and developed by Kohzu.