Vacuum Stages
MVRA16A-WH01
Price
ASK
-
Drawings fileDrawing For Download
Specification (Mechanical)
Model Number
MVRA16A-WH01
Table Size
Φ158mm
Guide Mechanism
angular bearing
Motion Range
±170°
Angular Range
±170°
Lead Mechanism
Worm & Worm Wheel 1/180
Resolution Full/Half Step
0.004° / 0.002°
Resolution Micro Step (1/20 div)
0.0002°
Maximum Speed
10°/sec : Half 5kpps
Accumulated Lead Error
≦0.01°/360°
Lost Motion
≦0.008°
Angular Repeatability
≦0.01°
Pitch Error
≦0.004°/2°
Backlash
≦0.004°
Moment Load Stiffness
0.03 arcsec/N cm
Load Capacity
588N (60kgf)
Surface Runout
≦20μm/360°
Eccentricity
≦10μm/360°
Material
Aluminum Alloy
Weight
5.6kg
Specification (Electrical)
5 Phase Stepper Motor
Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Connector
Vacuum D-Sub 9Pin (Accu-Glass Products: 9D-HVCP)
Control Electronics
Motor Controller
See the corresponded motor controller
Motor Driver
See the corresponded motor driver
Motor Cable
See the corresponded motor cable
Remarks and Features
●Worm & worm wheel type vacuum-compatible motorized rotation stage with precision bearings.
●Uses vacuum-compatible 5-phase stepping motor.
