KOHZU

Vacuum Stages

MVXA05A-L202

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  • Drawings file
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Specification (Mechanical)
Model Number
MVXA05A-L202
Table Size
50mm×50mm
Guide Mechanism
Linear Guide
Motion Range
±25mm
Lead Mechanism
Ball Screw, Lead 1.0mm
Resolution　Full/Half Step
2μm/1μm
Resolution　Micro Step (1/20 div)
0.1μm
Maximum Speed
5mm/sec : Half 5kpps
Accumulated Lead Error
≦ 15μm/50mm
Repeatability
≦±0.5μm
Lost Motion
≦ 1μm
Straightness (Horizontal)
≦ 3μm/50mm
Straightness (Vertical)
≦ 3μm/50mm
Backlash
≦ 1μm
Moment Load Stiffness
0.26 arcsec/N cm
Load Capacity
49N (5kgf)
Material
Aluminum Alloy
Weight
1.27kg
Specification (Electrical)
5 Phase Stepper Motor
Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Connector
Vacuum D-Sub 9Pin (Accu-Glass Products: 9D-HVCP)
Control Electronics
Motor Controller
See the corresponded motor controller
Motor Driver
See the corresponded motor driver
Motor Cable
See the corresponded motor cable
Accessory
See the corresponded accessory as like spacer or bracket
Remarks and Features

●Vacuum-compatible motorized X stage with precision linear guides.
●Long stroke type.
●The feed system uses ball screws for superior durability.
●Uses vacuum-compatible 5-phase stepping motor.

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