Vacuum Stages
MVZA07A-X103
Price
ASK
-
Drawings fileDrawing For Download
Specification (Mechanical)
Model Number
MVZA07A-X103
Table Size
70mm×70mm
Guide Mechanism
Cross Roller Guide
Motion Range
±10mm
Lead Mechanism
Ground Screw, Lead 0.5mm
Resolution Full/Half Step
1.0μm/0.5μm
Resolution Micro Step (1/20 div)
0.05μm
Maximum Speed
2.5mm/sec : Half 5kpps
Repeatability
≦±0.5μm
Lost Motion
≦1.5μm
Verticality
≦7μm/20mm
Load Capacity
49N (5kgf)
Material
Aluminum Alloy
Weight
1.4kg
Specification (Electrical)
5 Phase Stepper Motor
Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Connector
Vacuum D-Sub 9Pin (Accu-Glass Products: 9D-HVCP)
Control Electronics
Motor Controller
See the corresponded motor controller
Motor Driver
See the corresponded motor driver
Motor Cable
See the corresponded motor cable
Remarks and Features
●Vertical vacuum-compatible motorized Z-stage with precision crossed roller guides.
●The feed system uses high-resolution ground Screw.
●Uses vacuum-compatible 5-phase stepping motor.
