Vacuum Stages
MVZA10A-W202
Price
ASK
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Drawings fileDrawing For Download
Specification (Mechanical)
Model Number
MVZA10A-W202
Table Size
100mm×100mm
Guide Mechanism
Cross Roller Guide
Motion Range
±7mm
Lead Mechanism
1/2-Wedge, Ball Screw, Lead 1.0mm
Resolution Full/Half Step
1.0μm/0.5μm
Resolution Micro Step (1/20 div)
0.05μm
Maximum Speed
2.5mm/sec : Half 5kpps
Repeatability
≦±0.5μm
Lost Motion
≦1.0μm
Verticality
≦5μm/14mm
Load Capacity
98N (10kgf)
Material
Aluminum Alloy
Weight
3.25kg
Specification (Electrical)
5 Phase Stepper Motor
Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Connector
Vacuum D-Sub 9Pin (Accu-Glass Products: 9D-HVCP)
Control Electronics
Motor Controller
See the corresponded motor controller
Motor Driver
See the corresponded motor driver
Motor Cable
See the corresponded motor cable
Remarks and Features
●A wedge-type vacuum-compatible automatic Z-stage with precision crossed roller guides.
●The feed system uses ball screws for superior durability.
●Uses vacuum-compatible 5-phase stepping motor.
