Thank you for your continued support and partnership.

We are pleased to introduce our high-precision XY stage, ideal for positioning φ300 mm wafers.

This product offers a well-balanced design that ensures both high accuracy and stability, with the following key features:
・Utilizes a wide-base X stage to stably support the center of gravity of the upper axis throughout the entire stroke
・Vertical straightness: 7 µm (guaranteed value for XY combination)
・Minimizes attitude variation during motion, maintaining high positioning accuracy even at the work point
・Compatible with various motor options, including servo motors
・Cable carrier and linear scale can be installed as optional components

Model Number: YALW-L23301

For more detailed specifications and custom options, please refer to the following URL:
https://www.kohzuprecision.com/wp-content/themes/kohzu/assets/pdf/Flyer_YALW-L23301.pdf