Positioning Stages
【 Montblanc Series 】
ZM10A-C3C
Specification (Mechanical)
Model Number
ZM10A-C3C
Mirror Model Number
ZM10A-C3C-R
Table Size
100mm×100mm
Guide Mechanism
Cross Roller Guide
Actuator
Fine Pitch Positioner FPP03-13(13mm)
Motion Range
Coarse ±1.5mm, Fine 0.075mm
Minimum Readout
Coarse 2.5μm/div, Fine 0.125μm/div
Straightness
≦ 3μm/3mm
Load Capacity
68.6N (7kgf)
Material
Aluminum Alloy
Finishing
Clear Matt Anodizing
Weight
1.7kg
Overhaul Price
ASK
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
ASK
Vacuum Lubricant Change Price ("-V" at the end of model number)
ASK
Remarks and Features
●A wedge-type manual Z-stage with precision crossed roller guides.
●The body material is aluminum Clear Matt Anodizing.
●ZM10A-C3CはManual XY stage with precision crossed roller guides.
●The FPP03-13 is a sub-micron micrometer head uniquely designed and developed by Kohzu.