Manual X/XY Stage
XM10A-C3-CL
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Remarks and Features
Specification (Mechanical)
Model Number | XM10A-C3-CL |
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Mirror Model Number | XM10A-C3-R-CL |
Table Size | 100mm×100mm |
Guide Mechanism | Cross-Roller Guide |
Motion Range | Coarse 13mm, Fine 0.3mm |
Straightness | ≦1.5μm/13mm |
Minimum Readout | Coarse 10μm/div, Fine 0.5μm/div |
Moment Load Stiffness | 0.07 arcsec/N・cm |
Load Capacity | 98N (10kgf) |
Material | Aluminum Alloy |
Finishing | Clear-Matt Anodizing |
Weight | 0.85kg |
Perpendicularity | - |
Actuator | Fine Pitch Positioner FPP03-13(13mm) |
Overhaul Price |
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~ |
Lubricant Change Option | |
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Clean Room Lubricant Change Price ("-C" at the end of model number) | |
Vacuum Lubricant Change Price ("-V" at the end of model number) |
Motor Change Option | |
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Same Size Motor Change Price | ~ |
Different Size Motor Change Price | ~ |
Accessory | |
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Accessory | See the corresponded accessory as like spacer or bracket |
Manual X/XY Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Custom-made units
- Product Comparing
- Control Electronics
- Accessories