Manual X/XY Stage
XM10A-S3-CL
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| Drawings file |
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| Drawing For Download |
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| Connect Fig File |
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Remarks and Features
Specification (Mechanical)
| Model Number | XM10A-S3-CL |
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| Mirror Model Number | XM10A-S3-R-CL |
| Table Size | 100mm×100mm |
| Guide Mechanism | Cross-Roller Guide |
| Motion Range | Coarse 13mm, Fine 0.3mm |
| Straightness | ≦1.5μm/13mm |
| Minimum Readout | Coarse 10μm/div, Fine 0.5μm/div |
| Moment Load Stiffness | 0.07 arcsec/N･cm |
| Load Capacity | 98N (10kgf) |
| Material | Aluminum Alloy |
| Finishing | Clear-Matt Anodizing |
| Weight | 0.85kg |
| Perpendicularity | - |
| Actuator | Fine Pitch Positioner FPP03-13(13mm) |
| Overhaul Price |
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| Lubricant Change Option | |
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| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
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| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
| Accessory | |
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| Accessory | See the corresponded accessory as like spacer or bracket |
Manual X/XY Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Custom-made units
- Product Comparing
- Control Electronics
- Accessories