Motorized X/XY Stage

XA07A-R2H01

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Remarks and Features

Please, prepare the cable for 5 lead motor.
Not compatible with 2 phase stepper motor.
Specification (Mechanical)
Model NumberXA07A-R2H01
Mirror Model NumberXA07A-R2H01-R
Table Size 70mm×70mm
Guide MechanismCross-Roller Guide
Motion Range± 10mm
Lead MechanismBall Screw, Lead 1.0mm
Resolution Full/Half Step 2μm/1μm
Resolution Micro Step (1/20 div)0.1μm
Maximum Speed10mm/sec
Accumulated Lead Error≦ 5μm/20mm (AVE. 1.37μm/20mm)
Repeatability≦±0.2μm (AVE. ±0.08μm)
Lost Motion≦ 0.5μm (AVE. 0.39μm)
Straightness (Horizontal)≦ 0.5μm/20mm (AVE. 0.17μm/20mm)
Straightness (Vertical)≦ 1μm/20mm (AVE. 0.45μm/20mm)
Backlash≦0.5μm (AVE. 0.24μm)
Moment Load Stiffness0.05 arcsec/N・cm (AVE. 0.03 arcsec/N・cm)
Load Capacity 98N (10kgf)
MaterialAluminum Alloy
FinishingClear-Matt Anodizing
Weight 0.65kg
Perpendicularity-
Specification (Electrical)
Standard Motor5 phase stepper motor(TamagawaSeiki:TS3664N29E4)
Phase Current 0.75A, Basic Step 0.72°
Motor shaft diameter:φ5mm
Conformance option handle:Atype
Standard Connector20Pin Round (Hirose: RP13A-12JG-20PC)
Sensor ModelF-115(HOME, LIMIT), Mirror Model: F-115R(HOME, LIMIT)
Overhaul Price
~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ¥ -~
Different Size Motor Change Price ¥ -~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Motorized X/XY Stage