Motorized X/XY Stage
XA10A-L101
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| Drawings file |
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| Connect Fig File |
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Remarks and Features
Vertical layout as a Z stage is available.
2 phase stepper motor is available. [Model] XA10A-L101-BM (Additional Cost￥40,000)
2 phase stepper motor is available. [Model] XA10A-L101-BM (Additional Cost￥40,000)
Specification (Mechanical)
| Model Number | XA10A-L101 |
|---|---|
| Mirror Model Number | XA10A-L101-R |
| Table Size | 100mm×100mm |
| Guide Mechanism | Linear Guide |
| Motion Range | ± 50mm |
| Lead Mechanism | Ground Screw, Lead 1.0mm |
| Resolution Full/Half Step | 2μm/1μm |
| Resolution Micro Step (1/20 div) | 0.1μm |
| Maximum Speed | 10mm/sec ※When using a driver with an input power supply of 100 VAC specifications |
| Accumulated Lead Error | ≦20μm/100mm (AVE. 4.31μm/100mm) |
| Repeatability | ≦±0.5μm (AVE. ±0.08μm) |
| Lost Motion | ≦ 2μm (AVE. 0.99μm) |
| Straightness (Horizontal) | ≦ 3μm/100mm (AVE. 0.79μm/100mm) |
| Straightness (Vertical) | ≦ 2μm/100mm (AVE. 0.69μm/100mm) |
| Backlash | ≦2μm (AVE. 0.36μm) |
| Moment Load Stiffness | 0.05 arcsec/N･cm (AVE. 0.01 arcsec/N･cm) |
| Load Capacity | 196N (20kgf) |
| Material | Aluminum Alloy |
| Finishing | Clear-Matt Anodizing |
| Weight | 3.8kg |
| Perpendicularity | - |
Specification (Electrical)
| Standard Motor | 5 phase stepper motor (Oriental Motor:C087Q-9215P) 2 phase stepper motor (Oriental Motor: PK264JDB) Motor Shaft Diameter:Φ8mm Conformance option handle: B type |
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| Standard Connector | 5 phase stepper motor:20Pin Round (Hirose:RP13A-12RA-20PC) 2 phase stepper motor:20Pin Rectangular (Hirose:PC-1620,P-1620A-STA) |
| Sensor Model | F-104(LIMIT), F-105(HOME) |
| Overhaul Price |
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| Lubricant Change Option | |
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| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
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| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
| Control Electronics | |
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| Motor Controller | See the corresponded motor controller |
| Motor Driver | See the corresponded motor driver |
| Motor Cable | See the corresponded motor cable |
| Accessory | |
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| Accessory | See the corresponded accessory as like spacer or bracket |
Motorized X/XY Stage
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