Motorized X/XY Stage

XA10A-R102

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Remarks and Features

Vertical layout as a Z stage is available.
2 phase stepper motor is available. [Model] XA10A-R102-BM
Specification (Mechanical)
Model NumberXA10A-R102
Mirror Model NumberXA10A-R102-RRR
Table Size100mm×100mm
Guide MechanismCross-Roller Guide
Motion Range± 12.5mm
Lead MechanismGround Screw, Lead 0.5mm
Resolution　Full/Half Step 0.5μm/0.25μm
Resolution　Micro Step (1/20 div)0.025μm
Maximum Speed 2.5mm/sec
Accumulated Lead Error≦ 8μm/25mm (AVE. 1.01μm/25mm)
Repeatability≦±0.3μm (AVE. ±0.06μm)
Lost Motion≦ 1μm (AVE. 0.23μm)
Straightness (Horizontal)≦ 0.5μm/25mm (AVE. 0.14μm/25mm)
Straightness (Vertical)≦ 0.5μm/25mm (AVE. 0.15μm/25mm)
Backlash≦0.5μm (AVE. 0.12μm)
Moment Load Stiffness0.02 arcsec/N･cm (AVE. 0.01 arcsec/N･cm)
Load Capacity 196N (20kgf)
MaterialAluminum Alloy
FinishingClear-Matt Anodizing
Weight 1.55kg
Perpendicularity-
Specification (Electrical)
Standard Motor5 phase stepper motor (Oriental Motor: PK544PMB)
2 phase stepper motor (Oriental Motor: PKP244D15B)
Motor Shaft Diameter:Φ5mm Conformance option handle: A type
Standard Connector20Pin Round (Hirose: RP13A-12RA-20PC)
Sensor ModelF-101(HOME, LIMIT)
Overhaul Price
~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price
　Control Electronics
　Motor Controller　See the corresponded motor controller
　Motor Driver　See the corresponded motor driver
　Motor Cable　See the corresponded motor cable
　Accessory
　Accessory　See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

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Motorized X/XY Stage