Motorized X/XY Stage


¥ 210,000
Compare with:
Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

Please, prepare the cable for 10 lead motor.
2 phase stepper motor is available. [Model] XA16A-R1-BM (Additional Cost¥40,000)

Specification (Mechanical)
Model NumberXA16A-R1
Mirror Model NumberXA16A-R1-R
Table Size160mm×124mm
Guide MechanismCross-Roller Guide
Motion Range±25mm
Lead MechanismGround Screw, Lead 1.0mm
Resolution Full/Half Step2μm/1μm
Resolution Micro Step (1/20 div)0.1μm
Maximum Speed10mm/sec
Accumulated Lead Error≦10μm/50mm
Lost Motion≦2μm
Straightness (Horizontal)≦1μm/50mm
Straightness (Vertical)≦2μm/50mm
Moment Load Stiffness0.01 arcsec/N・cm
Load Capacity294N (30kgf)
MaterialAluminum Alloy
FinishingClear-Matt Anodizing
Specification (Electrical)
Standard Motor5 phase stepper motor (Oriental Motor: PK566-B)
2 phase stepper motor (Oriental Motor: PK264JDB)
Motor Shaft Diameter:Φ8mm Conformance option handle: B type
Standard Connector20Pin Rectangular (Hirose: PC-1620, P-1620A-STA)
Sensor Model F-101(HOME, LIMIT), F-107(INDEX)
Vacuumup to "ultra heigh vacuum" (UHV), contact us.
Clean room-C Lubricant exchange
Mirror Symmetrysee technical for possibilities, contact us
Motor handleto manually move the stage
Motor typenearly any motor type can be mounted, contact us.
Connector typeexchange to DSub 15 connector, contact us.
Limitdifferent types of optical/mechanical, contact us.
EncoderLinear encoders (up to 50nm), contact us.
Adaptersmount stages together. contact us.**
CustomizationAnything you need? contact us.**
Overhaul Price
¥ 60,000~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number) ¥ 48,000
Vacuum Lubricant Change Price ("-V" at the end of model number) ¥ 48,000
Motor Change Option
Same Size Motor Change Price ¥ 15,000~
Different Size Motor Change Price ¥ 36,000~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Motorized X/XY Stage