Motorized X/XY Stage
XA16A-R1
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Remarks and Features
Please, prepare the cable for 10 lead motor.
2 phase stepper motor is available. [Model] XA16A-R1-BM (Additional Cost¥40,000)
2 phase stepper motor is available. [Model] XA16A-R1-BM (Additional Cost¥40,000)
Specification (Mechanical)
Model Number | XA16A-R1 |
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Mirror Model Number | XA16A-R1-R |
Table Size | 160mm×124mm |
Guide Mechanism | Cross-Roller Guide |
Motion Range | ±25mm |
Lead Mechanism | Ground Screw, Lead 1.0mm |
Resolution Full/Half Step | 2μm/1μm |
Resolution Micro Step (1/20 div) | 0.1μm |
Maximum Speed | 10mm/sec |
Accumulated Lead Error | ≦10μm/50mm |
Repeatability | ≦±0.5μm |
Lost Motion | ≦2μm |
Straightness (Horizontal) | ≦1μm/50mm |
Straightness (Vertical) | ≦2μm/50mm |
Backlash | ≦1μm |
Moment Load Stiffness | 0.01 arcsec/N・cm |
Load Capacity | 294N (30kgf) |
Material | Aluminum Alloy |
Finishing | Clear-Matt Anodizing |
Weight | 3.6kg |
Perpendicularity | - |
Specification (Electrical)
Standard Motor | 5 phase stepper motor (Oriental Motor: PK566-B) 2 phase stepper motor (Oriental Motor: PK264JDB) Motor Shaft Diameter:Φ8mm Conformance option handle: B type |
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Standard Connector | 20Pin Rectangular (Hirose: PC-1620, P-1620A-STA) |
Sensor Model | F-101(HOME, LIMIT), F-107(INDEX) |
Options/Accessories
Vacuum | up to "ultra heigh vacuum" (UHV), contact us. |
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Clean room | -C Lubricant exchange |
Mirror Symmetry | see technical for possibilities, contact us |
Motor handle | to manually move the stage |
Motor type | nearly any motor type can be mounted, contact us. |
Connector type | exchange to DSub 15 connector, contact us. |
Limit | different types of optical/mechanical, contact us. |
Encoder | Linear encoders (up to 50nm), contact us. |
Adapters | mount stages together. contact us.** |
Customization | Anything you need? contact us.** |
Overhaul Price |
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¥ 60,000~ |
Lubricant Change Option | |
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Clean Room Lubricant Change Price ("-C" at the end of model number) | ¥ 48,000 |
Vacuum Lubricant Change Price ("-V" at the end of model number) | ¥ 48,000 |
Motor Change Option | |
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Same Size Motor Change Price | ¥ 15,000~ |
Different Size Motor Change Price | ¥ 36,000~ |
Control Electronics | |
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Motor Controller | See the corresponded motor controller |
Motor Driver | See the corresponded motor driver |
Motor Cable | See the corresponded motor cable |
Accessory | |
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Accessory | See the corresponded accessory as like spacer or bracket |
Motorized X/XY Stage
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- Product Comparing
- Vacuum Stages
- Control Electronics
- Accessories