Motorized X/XY Stage
XA16A-R101
| Price(JPY) |
|---|
| ¥ |
| Quote |
|---|
| Quantity |
Compare with:
Select a product to compare
| Drawings file |
|---|
 |
| Drawing For Download |
|---|
   |
| Connect Fig File |
|---|
 
|
Remarks and Features
Vertical layout as a Z stage is available.
2 phase stepper motor is available. (XA16A-R101-BM Additional Cost￥40,000）
Note: 2 phase stepper motor specifications change connector.
2 phase stepper motor is available. (XA16A-R101-BM Additional Cost￥40,000）
Note: 2 phase stepper motor specifications change connector.
Specification (Mechanical)
| Model Number | XA16A-R101 |
|---|---|
| Mirror Model Number | XA16A-R101-R |
| Table Size | 160mm×124mm |
| Guide Mechanism | Cross-Roller Guide |
| Motion Range | ± 30mm |
| Lead Mechanism | Ground Screw, Lead 1.0mm |
| Resolution Full/Half Step | 2μm/1μm |
| Resolution Micro Step (1/20 div) | 0.1μm |
| Maximum Speed | 10mm/sec |
| Accumulated Lead Error | ≦10μm/60mm (AVE. 5.24μm/60mm) |
| Repeatability | ≦±0.5μm (AVE. ±0.13μm) |
| Lost Motion | ≦ 2μm (AVE. 0.89μm) |
| Straightness (Horizontal) | ≦ 1μm/60mm (AVE. 0.26μm/60mm) |
| Straightness (Vertical) | ≦ 2μm/60mm (AVE. 0.28μm/60mm) |
| Backlash | ≦1μm (AVE. 0.21μm) |
| Moment Load Stiffness | 0.01 arcsec/N･cm (AVE. 0.005 arcsec/N･cm) |
| Load Capacity | 294N (30kgf) |
| Material | Aluminum Alloy |
| Finishing | Clear-Matt Anodizing |
| Weight | 3.6kg |
| Perpendicularity | - |
Specification (Electrical)
| Standard Motor | 5 phase stepper motor (Oriental Motor: C087Q-9215P) 2 phase stepper motor (Oriental Motor: PK264JDB) Motor Shaft Diameter:Φ8mm Conformance option handle: Btype |
|---|---|
| Standard Connector | 5 phase stepper motor: 20Pin Round (Hirose: RP13A-12RA-20PC) 2 phase stepper motor: 20Pin Rectangular (Hirose: PC-1620,P-1620A-STA) |
| Sensor Model | F-101(HOME, LIMIT) |
| Overhaul Price |
|---|
| ~ |
| Lubricant Change Option | |
|---|---|
| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
|---|---|
| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
| Control Electronics | |
|---|---|
| Motor Controller | See the corresponded motor controller |
| Motor Driver | See the corresponded motor driver |
| Motor Cable | See the corresponded motor cable |
| Accessory | |
|---|---|
| Accessory | See the corresponded accessory as like spacer or bracket |
Motorized X/XY Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Product Comparing
- Control Electronics
- Accessories