Motorized X/XY Stage

XA16F-L2101

Price(JPY)
¥ 360,000
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Remarks and Features

Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available [Model] XA16F-L2101-BM (Additional Cost¥40,000)
Note: 2 phase stepper motor specifications change connector.
Specification (Mechanical)
Model NumberXA16F-L2101
Mirror Model NumberXA16F-L2101-R
Table Size160mm×160mm
Guide MechanismLinear Guide
Motion Range±50mm
Lead MechanismBall Screw, Lead 5.0mm
Resolution Full/Half Step10μm/5μm
Resolution Micro Step (1/20 div)0.5μm
Maximum Speed50mm/sec
Accumulated Lead Error≦15μm/100mm  (AVE. 2.71/100mm)
Repeatability≦±0.5μm  (AVE. ±0.06μm)
Lost Motion≦5μm  (AVE. 2.82μm)
Straightness (Horizontal) ≦4μm/100mm  (AVE. 1.03μm/100mm)
Straightness (Vertical)≦4μm/100mm  (AVE. 0.78μm/100mm)
Backlash ≦2μm  (AVE. 0.22μm)
Moment Load Stiffness0.02 arcsec/N・cm  (AVE. 0.001 arcsec/N・cm)
Load Capacity392N (40kgf)
MaterialSteel (Table: Aluminum Alloy)
FinishingMatt Black
Weight11.5kg
Specification (Electrical)
Standard Motor5 phase stepper motor (Oriental motor:C087Q-9215P)
2 phase stepper motor (Oriental motor:PK264JDB)
Motor shaft diameter:Φ8mm
Standard Connector5 phase stepper motor:20Pin Round
(Hirose:RP13A-12RA-20PC)
2 phase stepper motor:20Pin Rectangular
(Hirose:PC-1620,P-1620A-STA)
Sensor ModelF-104(LIMIT), F-105(HOME)
Overhaul Price
¥ 60,000~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number) ¥ 48,000
Vacuum Lubricant Change Price ("-V" at the end of model number) ¥ 48,000
Motor Change Option
Same Size Motor Change Price ¥ 15,000~
Different Size Motor Change Price ¥ 36,000~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Motorized X/XY Stage