Motorized X/XY Stage
XA16F-L2201
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| Drawings file |
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| Drawing For Download |
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| Connect Fig File |
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Remarks and Features
Returning direction is determined with zone sensor. CW side’s light is intercepted in all time.
Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available. [Model] XA16F-L2201-BM (Additional Cost￥40,000)
Note: 2 phase stepper motor specifications change connector.
Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available. [Model] XA16F-L2201-BM (Additional Cost￥40,000)
Note: 2 phase stepper motor specifications change connector.
Specification (Mechanical)
| Model Number | XA16F-L2201 |
|---|---|
| Mirror Model Number | XA16F-L2201-R |
| Table Size | 160mm×160mm |
| Guide Mechanism | Linear Guide |
| Motion Range | ±100mm |
| Lead Mechanism | Ball Screw, Lead 5.0mm |
| Resolution Full/Half Step | 10μm/5μm |
| Resolution Micro Step (1/20 div) | 0.5μm |
| Maximum Speed | 50mm/sec ※When using a driver with an input power supply of 100 VAC specifications |
| Accumulated Lead Error | ≦20μm/200mm (AVE. 5.38μm/200mm) |
| Repeatability | ≦±0.5μm (AVE. ±0.07μm) |
| Lost Motion | ≦ 5μm (AVE. 2.93μm) |
| Straightness (Horizontal) | ≦ 5μm/200mm (AVE. 1.57μm/200mm) |
| Straightness (Vertical) | ≦ 5μm/200mm (AVE. 1.07μm/200mm) |
| Backlash | ≦2μm (AVE. 0.23μm) |
| Moment Load Stiffness | 0.02 arcsec/N･cm (AVE. 0.001 arcsec/N･cm) |
| Load Capacity | 392N (40kgf) |
| Material | Steel (Table: Aluminum Alloy) |
| Finishing | Matt Black |
| Weight | 13.5kg |
Specification (Electrical)
| Standard Motor | 5 phase stepper motor (Oriental Motor: C087Q-9215P) 2 phase stepper motor (Oriental Motor: PK264JDB) Motor Shaft Diameter:Φ8mm Conformance option handle: B type |
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| Standard Connector | 5 phase stepper motor:20Pin Round (Hirose:RP13A-12RA-20PC) 2 phase stepper motor:20Pin Rectangular (Hirose:PC-1620,P-1620A-STA) |
| Sensor Model | F-104(LIMIT), F-105(HOME) |
| Overhaul Price |
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| Lubricant Change Option | |
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| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
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| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
| Control Electronics | |
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| Motor Controller | See the corresponded motor controller |
| Motor Driver | See the corresponded motor driver |
| Motor Cable | See the corresponded motor cable |
| Accessory | |
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| Accessory | See the corresponded accessory as like spacer or bracket |
Motorized X/XY Stage
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