Motorized X/XY Stage
XA20F-L2501
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Remarks and Features
Returning direction is determined with zone sensor. CW side’s light is intercepted in all time.
Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available. [Model] XA20F-L2501-BM (Additional Cost¥40,000)
Note: 2 phase stepper motor specifications change connector.
Build to Order
Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available. [Model] XA20F-L2501-BM (Additional Cost¥40,000)
Note: 2 phase stepper motor specifications change connector.
Build to Order
Specification (Mechanical)
Model Number | XA20F-L2501 |
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Mirror Model Number | XA20F-L2501-R |
Table Size | 200mm×218mm |
Guide Mechanism | Linear Guide |
Motion Range | ±250mm |
Lead Mechanism | Ball Screw, Lead 5.0mm |
Resolution Full/Half Step | 10μm/5μm |
Resolution Micro Step (1/20 div) | 0.5μm |
Maximum Speed | 50mm/sec |
Accumulated Lead Error | ≦40μm/500mm |
Repeatability | ≦±0.5μm |
Lost Motion | ≦10μm |
Straightness (Horizontal) | ≦ 8μm/500mm |
Straightness (Vertical) | ≦ 8μm/500mm |
Backlash | ≦2μm |
Moment Load Stiffness | 0.003 arcsec/N・cm |
Load Capacity | 980N (100kgf) |
Material | Steel (Table: Aluminum Alloy) |
Finishing | Matt Black |
Weight | 44kg |
Specification (Electrical)
Standard Motor | 5 phase stepper motor (Oriental motor:C087Q-9215P) 2 phase stepper motor (Oriental motor:PK264JDB) Motor shaft diameter:Φ8mm Conformance option handle: B type |
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Standard Connector | 5 phase stepper motor:20Pin Round (Hirose:RP13A-12RA-20PC) 2 phase stepper motor:20Pin Rectangular (Hirose:PC-1620,P-1620A-STA) |
Sensor Model | F-104(LIMIT), F-105(HOME) |
Overhaul Price |
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~ |
Lubricant Change Option | |
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Clean Room Lubricant Change Price ("-C" at the end of model number) | |
Vacuum Lubricant Change Price ("-V" at the end of model number) |
Motor Change Option | |
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Same Size Motor Change Price | ~ |
Different Size Motor Change Price | ~ |
Control Electronics | |
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Motor Controller | See the corresponded motor controller |
Motor Driver | See the corresponded motor driver |
Motor Cable | See the corresponded motor cable |
Accessory | |
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Accessory | See the corresponded accessory as like spacer or bracket |
Motorized X/XY Stage
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- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Product Comparing
- Control Electronics
- Accessories