Motorized X/XY Stage
XA20F-L2501
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| Drawings file |
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| Drawing For Download |
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| Connect Fig File |
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Remarks and Features
Returning direction is determined with zone sensor. CW side’s light is intercepted in all time.
Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available. [Model] XA20F-L2501-BM (Additional Cost￥40,000)
Note: 2 phase stepper motor specifications change connector.
Build to Order
Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available. [Model] XA20F-L2501-BM (Additional Cost￥40,000)
Note: 2 phase stepper motor specifications change connector.
Build to Order
Specification (Mechanical)
| Model Number | XA20F-L2501 |
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| Mirror Model Number | XA20F-L2501-R |
| Table Size | 200mm×218mm |
| Guide Mechanism | Linear Guide |
| Motion Range | ±250mm |
| Lead Mechanism | Ball Screw, Lead 5.0mm |
| Resolution Full/Half Step | 10μm/5μm |
| Resolution Micro Step (1/20 div) | 0.5μm |
| Maximum Speed | 50mm/sec |
| Accumulated Lead Error | ≦40μm/500mm |
| Repeatability | ≦±0.5μm |
| Lost Motion | ≦10μm |
| Straightness (Horizontal) | ≦ 8μm/500mm |
| Straightness (Vertical) | ≦ 8μm/500mm |
| Backlash | ≦2μm |
| Moment Load Stiffness | 0.003 arcsec/N･cm |
| Load Capacity | 980N (100kgf) |
| Material | Steel (Table: Aluminum Alloy) |
| Finishing | Matt Black |
| Weight | 44kg |
Specification (Electrical)
| Standard Motor | 5 phase stepper motor (Oriental motor:C087Q-9215P) 2 phase stepper motor (Oriental motor:PK264JDB) Motor shaft diameter:Φ8mm Conformance option handle: B type |
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| Standard Connector | 5 phase stepper motor:20Pin Round (Hirose:RP13A-12RA-20PC) 2 phase stepper motor:20Pin Rectangular (Hirose:PC-1620,P-1620A-STA) |
| Sensor Model | F-104(LIMIT), F-105(HOME) |
| Overhaul Price |
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| Lubricant Change Option | |
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| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
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| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
| Control Electronics | |
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| Motor Controller | See the corresponded motor controller |
| Motor Driver | See the corresponded motor driver |
| Motor Cable | See the corresponded motor cable |
| Accessory | |
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| Accessory | See the corresponded accessory as like spacer or bracket |
Motorized X/XY Stage
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- Control Electronics
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