Motorized X/XY Stage


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Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

Returning direction is determined with zone sensor. CW side’s light is intercepted in all time.
Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available. [Model] XA20F-L2501-BM (Additional Cost¥40,000)
Note: 2 phase stepper motor specifications change connector.
Build to Order

Specification (Mechanical)
Model NumberXA20F-L2501
Mirror Model NumberXA20F-L2501-R
Table Size200mm×218mm
Guide MechanismLinear Guide
Motion Range±250mm
Lead MechanismBall Screw, Lead 5.0mm
Resolution Full/Half Step10μm/5μm
Resolution Micro Step (1/20 div)0.5μm
Maximum Speed50mm/sec
Accumulated Lead Error≦40μm/500mm
Lost Motion≦10μm
Straightness (Horizontal)≦ 8μm/500mm
Straightness (Vertical)≦ 8μm/500mm
Moment Load Stiffness0.003 arcsec/N・cm
Load Capacity 980N (100kgf)
MaterialSteel (Table: Aluminum Alloy)
FinishingMatt Black
Specification (Electrical)
Standard Motor5 phase stepper motor (Oriental motor:C087Q-9215P)
2 phase stepper motor (Oriental motor:PK264JDB)
Motor shaft diameter:Φ8mm
Conformance option handle: B type
Standard Connector5 phase stepper motor:20Pin Round
2 phase stepper motor:20Pin Rectangular
Sensor ModelF-104(LIMIT), F-105(HOME)
Overhaul Price
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Motorized X/XY Stage