Motorized X/XY Stage
YA16A-R101
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Remarks and Features
Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available. [Model] YA16A-R101-BM (Additional Cost¥80,000)
Note: 2 phase stepper motor specifications change connector.
2 phase stepper motor is available. [Model] YA16A-R101-BM (Additional Cost¥80,000)
Note: 2 phase stepper motor specifications change connector.
Specification (Mechanical)
Model Number | YA16A-R101 |
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Mirror Model Number | YA16A-R101-RRR |
Table Size | 160mm×124mm |
Guide Mechanism | Cross-Roller Guide |
Motion Range | ± 30mm |
Lead Mechanism | Ground Screw, Lead 1.0mm |
Resolution Full/Half Step | 2μm/1μm |
Resolution Micro Step (1/20 div) | 0.1μm |
Maximum Speed | 10mm/sec |
Accumulated Lead Error | ≦10μm/60mm |
Repeatability | ≦±0.5μm |
Lost Motion | ≦ 2μm |
Straightness (Horizontal) | ≦ 1μm/60mm |
Straightness (Vertical) | ≦ 2μm/60mm |
Backlash | ≦1μm |
Moment Load Stiffness | 0.03 arcsec/N・cm |
Load Capacity | 254.8N (26kgf) |
Material | Aluminum Alloy |
Finishing | Clear-Matt Anodizing |
Weight | 7.2kg |
Perpendicularity | ≦ 5μm/60mm |
Specification (Electrical)
Standard Motor | 5 phase stepper motor (Oriental motor:C087Q-9215P) 2 phase stepper motor (Oriental motor:PK264JDB) Motor shaft diameter:Φ8mm Conformance option handle: B type |
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Standard Connector | 5 phase stepper motor:20Pin Round (Hirose:RP13A-12RA-20PC) 2 phase stepper motor:20Pin Rectangular (Hirose:PC-1620,P-1620A-STA) |
Sensor Model | F-101(HOME, LIMIT) |
Overhaul Price |
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~ |
Lubricant Change Option | |
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Clean Room Lubricant Change Price ("-C" at the end of model number) | |
Vacuum Lubricant Change Price ("-V" at the end of model number) |
Motor Change Option | |
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Same Size Motor Change Price | ~ |
Different Size Motor Change Price | ~ |
Control Electronics | |
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Motor Controller | See the corresponded motor controller |
Motor Driver | See the corresponded motor driver |
Motor Cable | See the corresponded motor cable |
Accessory | |
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Accessory | See the corresponded accessory as like spacer or bracket |
Motorized X/XY Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Product Comparing
- Control Electronics
- Accessories