Motorized X/XY Stage
YA16A-R101
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| Drawings file |
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| Drawing For Download |
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| Connect Fig File |
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Remarks and Features
Please, prepare the cable for 5 lead motor.
2 phase stepper motor is available. [Model] YA16A-R101-BM (Additional Cost￥80,000)
Note: 2 phase stepper motor specifications change connector.
2 phase stepper motor is available. [Model] YA16A-R101-BM (Additional Cost￥80,000)
Note: 2 phase stepper motor specifications change connector.
Specification (Mechanical)
| Model Number | YA16A-R101 |
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| Mirror Model Number | YA16A-R101-RRR |
| Table Size | 160mm×124mm |
| Guide Mechanism | Cross-Roller Guide |
| Motion Range | ± 30mm |
| Lead Mechanism | Ground Screw, Lead 1.0mm |
| Resolution Full/Half Step | 2μm/1μm |
| Resolution Micro Step (1/20 div) | 0.1μm |
| Maximum Speed | 10mm/sec |
| Accumulated Lead Error | ≦10μm/60mm |
| Repeatability | ≦±0.5μm |
| Lost Motion | ≦ 2μm |
| Straightness (Horizontal) | ≦ 1μm/60mm |
| Straightness (Vertical) | ≦ 2μm/60mm |
| Backlash | ≦1μm |
| Moment Load Stiffness | 0.03 arcsec/N･cm |
| Load Capacity | 254.8N (26kgf) |
| Material | Aluminum Alloy |
| Finishing | Clear-Matt Anodizing |
| Weight | 7.2kg |
| Perpendicularity | ≦ 5μm/60mm |
Specification (Electrical)
| Standard Motor | 5 phase stepper motor (Oriental motor:C087Q-9215P) 2 phase stepper motor (Oriental motor:PK264JDB) Motor shaft diameter:Φ8mm Conformance option handle: B type |
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| Standard Connector | 5 phase stepper motor:20Pin Round (Hirose:RP13A-12RA-20PC) 2 phase stepper motor:20Pin Rectangular (Hirose:PC-1620,P-1620A-STA) |
| Sensor Model | F-101(HOME, LIMIT) |
| Overhaul Price |
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| Lubricant Change Option | |
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| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
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| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
| Control Electronics | |
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| Motor Controller | See the corresponded motor controller |
| Motor Driver | See the corresponded motor driver |
| Motor Cable | See the corresponded motor cable |
| Accessory | |
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| Accessory | See the corresponded accessory as like spacer or bracket |
Motorized X/XY Stage
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