Motorized X/XY Stage


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Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

Please, prepare the cable for 5 lead motor.
Accumulated lead error and straightness (vertical) are guaranteed accuracy in a single axis.

2 phase stepper motor is available [Model] YA16F-L23101-BM (Additional Cost¥80,000)
Note: 2 phase stepper motor specifications change connector.
Specification (Mechanical)
Model NumberYA16F-L23101
Mirror Model NumberYA16F-L23101-RRR
Table Size160mm×160mm
Guide MechanismLinear Guide
Motion Range± 50mm(upper axis) , ± 152mm(Lower axis)
Lead MechanismBall Screw, Lead 5.0mm
Resolution Full/Half Step10μm / 5μm
Resolution Micro Step (1/20 div)0.5μm
Maximum Speed50mm/sec
Accumulated Lead Error≦15μm/100mm(upper axis) , ≦20μm/304mm(Lower axis)
Lost Motion≦ 5μm
Straightness (Horizontal)≦ 4μm/100mm(upper axis) , ≦ 5μm/304mm(Lower axis)
Straightness (Vertical)≦ 2μm/100mm(upper axis) , ≦ 5μm/304mm(Lower axis)
Backlash ≦2μm
Moment Load Stiffness0.04 arcsec/N・cm
Load Capacity 274.4N (28kgf)
MaterialSteel (Table: Aluminum Alloy)
FinishingMatt Black
Specification (Electrical)
Standard Motor5 phase stepper motor (Oriental motor:C087Q-9215P)
2 phase stepper motor (Oriental motor:PK264JDB)
Motor shaft diameter:Φ8mm
Standard Connector5 phase stepper motor:20Pin Round
2 phase stepper motor:20Pin Rectangular
Sensor ModelF-104(LIMIT), F-105(HOME)
Overhaul Price
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Motorized X/XY Stage