Motorized X/XY Stage


¥ 130,000
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Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

Please, prepare the cable for ten (10) lead motor.
Specification (Mechanical)
Model NumberXA07A-R1
Mirror Model NumberXA07A-R1-R
Table Size70mm×70mm
Guide MechanismCross-Roller Guide
Motion Range±10mm
Lead MechanismGround Screw, Lead 0.5mm
Resolution Full/Half Step0.5μm/0.25μm
Resolution Micro Step (1/20 div)0.025μm
Maximum Speed2.5mm/sec
Accumulated Lead Error≦10μm/20mm
Lost Motion≦1μm
Straightness (Horizontal)≦0.5μm/20mm
Straightness (Vertical)≦1μm/20mm
Moment Load Stiffness0.10 arcsec/N・cm
Load Capacity98N (10kgf)
MaterialAluminum Alloy
FinishingClear-Matt Anodizing
Specification (Electrical)
Standard MotorFive (5) phase stepper motor (Oriental Motor: PX533MH-B) Phase Current 0.75A, Basic Step Angle 0.36°
Standard Connector20Pin Round (Hirose: RP13A-12RA-20PC)
Sensor ModelJH
Vacuumup to "ultra heigh vacuum" (UHV), contact us.
Clean room-C Lubricant exchange
Mirror Symmetrysee technical for possibilities, contact us
Motor handleto manually move the stage
Motor typenearly any motor type can be mounted, contact us.
Connector typeexchange to DSub 15 connector, contact us.
Limitdifferent types of optical/mechanical, contact us.
EncoderLinear encoders (up to 50nm), contact us.
Adaptersmount stages together. contact us.
CustomizationAnything you need? contact us.
Overhaul Price
¥ 42,000~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number) ¥ 30,000
Vacuum Lubricant Change Price ("-V" at the end of model number) ¥ 30,000
Motor Change Option
Same Size Motor Change Price ¥ 12,000~
Different Size Motor Change Price ¥ 30,000~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

On request.

Application Example
Kohzu stages fit modular together to build a multiaxis manipulator.
Motorized X/XY Stage