Motorized X/XY Stage

XA30A-R1

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Remarks and Features

Specification (Mechanical)
Model NumberXA30A-R1
Mirror Model NumberXA30A-R1-R
Table Size300mm×180mm
Guide MechanismCross-Roller Bearing
Motion Range±75mm
Lead MechanismGround Screw, Lead 1.0mm
Resolution　Full/Half Step1μm/step (Half Step)
Maximum Speed10mm/sec
Accumulated Lead Error25μm/150mm
Repeatability±1μm
Lost Motion4μm
Backlash2μm
Moment Load Stiffness0.1 arcsec/kgf-cm, Roll Direction
Load Capacity40kg
MaterialAluminum Alloy
FinishingClear-Matt Anodizing
Weight10.5kg
Specification (Electrical)
Standard MotorFive (5) phase stepper motor (Oriental Motor) (PK569-B)
Standard ConnectorP-1620BA
Options/Accessories
Vacuumup to "ultra heigh vacuum" (UHV), contact us.
Clean room-C Lubricant exchange
Mirror Symmetrysee technical for possibilities, contact us
Motor handleto manually move the stage
Motor typenearly any motor type can be mounted, contact us.
Connector typeexchange to DSub 15 connector, contact us.
Limitdifferent types of optical/mechanical, contact us.
EncoderLinear encoders (up to 50nm), contact us.
Adaptersmount stages together. contact us.**
CustomizationAnything you need? contact us.**
Overhaul Price
~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price
　Control Electronics
　Motor Controller　See the corresponded motor controller
　Motor Driver　See the corresponded motor driver
　Motor Cable　See the corresponded motor cable
　Accessory
　Accessory　See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

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Motorized X/XY Stage