Motorized X/XY Stage


¥ 380,000
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Drawings file
Drawing For Download
Connect Fig File

Remarks and Features

Please, prepare the cable for ten (10) lead motor.
Specification (Mechanical)
Model NumberYA10F-R2
Mirror Model NumberYA10F-R2-RRR
Table Size100mm×100mm
Guide MechanismCross-Roller Guide
Motion Range±12.5mm
Lead MechanismBall Screw, Lead 1.0mm
Resolution Full/Half Step1μm/0.5μm
Resolution Micro Step (1/20 div)0.05μm
Maximum Speed5mm/sec
Accumulated Lead Error≦5μm/25mm
Lost Motion≦0.5μm
Straightness (Horizontal)≦0.5μm/25mm
Straightness (Vertical)≦1μm/25mm
Moment Load Stiffness0.03 arcsec/N・cm
Load Capacity166.6N (17kgf)
FinishingNickel Plating
Specification (Electrical)
Standard MotorFive (5) phase stepper motor (Oriental Motor: PX535MH-B) Phase Current 0.75A, Basic Step Angle 0.36°
Standard Connector20Pin Rectangular (Hirose: PC-1620, P-1620A-STA)
Sensor ModelJH
Overhaul Price
¥ 96,000~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number) ¥ 72,000
Vacuum Lubricant Change Price ("-V" at the end of model number) ¥ 72,000
Motor Change Option
Same Size Motor Change Price ¥ 24,000~
Different Size Motor Change Price ¥ 60,000~
*The Motor cost is not included on Motor Change Price
 Control Electronics
 Motor Controller See the corresponded motor controller
 Motor Driver See the corresponded motor driver
 Motor Cable See the corresponded motor cable
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Information">The production of the former models is stopped on September 2015. Please, click the link page to see new model.

Motorized X/XY Stage