Vacuum Compatible Stages

Vacuum Z Stage

Product Photo Model Number Table Size Motion Range Load Capacity(Horizontal)
MVZA07A-X103 70mm×70mm ±10mm 49N (5kgf) Details
MVZA07A-W2C02 70mm×70mm ±2.5mm 49N (5kgf) Details
MVZA10A-W202 100mm×100mm ±7mm 98N (10kgf) Details
MVZA16A-W2C01 160mm×160mm ±8mm 196N (20kgf) Details