KOHZU

Vacuum Stages

MVSA05B-RT02

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Price ASK
  • Drawings file
    Drawing For Download
Specification (Mechanical)
Model Number
MVSA05B-RT02
Table Size
50mm×50mm
Guide Mechanism
Cross Roller Guide
Motion Range
±10°
Angular Range
±10°
Lead Mechanism
Worm & Worm Wheel 1/232
Resolution　Full/Half Step
0.00312°/0.00156°
Resolution　Micro Step (1/20 div)
0.000156°
Maximum Speed
7.75°/sec : Half 5kpps
Lost Motion
≦0.006°
Backlash
≦0.003°
Moment Load Stiffness
0.31 arcsec/N cm
Load Capacity
29.4N (3kgf)
Work Distance
50mm±0.2mm
Rotation Center Error
φ0.05mm/±10°
Material
Phosphor bronze
Weight
0.76kg
Specification (Electrical)
5 Phase Stepper Motor
Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Connector
Vacuum D-Sub 9Pin (Accu-Glass Products: 9D-HVCP)
Control Electronics
Motor Controller
See the corresponded motor controller
Motor Driver
See the corresponded motor driver
Motor Cable
See the corresponded motor cable
Accessory
See the corresponded accessory as like spacer or bracket
Remarks and Features

●Vacuum-compatible swivel stage using precision crossed roller guides as the guide system.
●The body material is phosphor bronze.
●Uses vacuum-compatible 5-phase stepping motor.

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