Vacuum Stages
MVSA13A-RM01
Price
ASK
-
Drawings fileDrawing For Download
Specification (Mechanical)
Model Number
MVSA13A-RM01
Table Size
130mm×130mm
Guide Mechanism
Cross Roller Guide
Motion Range
±10°
Angular Range
±10°
Lead Mechanism
Worm & Worm Wheel 1/400
Resolution Full/Half Step
0.0018°/0.0009°
Resolution Micro Step (1/20 div)
0.00009°
Maximum Speed
4.5°/sec : Half 5kpps
Lost Motion
≦0.01°
Backlash
≦0.006°
Moment Load Stiffness
0.02 arcsec/N cm
Load Capacity
98N (10kgf)
Work Distance
173mm±0.5mm
Rotation Center Error
φ0.05mm/±10°
Material
Aluminum Alloy
Weight
5.1kg
Specification (Electrical)
5 Phase Stepper Motor
Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Connector
Vacuum D-Sub 9Pin (Accu-Glass Products: 9D-HVCP)
Control Electronics
Motor Controller
See the corresponded motor controller
Motor Driver
See the corresponded motor driver
Motor Cable
See the corresponded motor cable
Remarks and Features
●Vacuum-compatible swivel stage using precision crossed roller guides as the guide system.
●Body material is aluminum.
●Uses vacuum-compatible 5-phase stepping motor.
