Vacuum Stages
MVXA10A-L201
Price
ASK
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Drawings fileDrawing For Download
Specification (Mechanical)
Model Number
MVXA10A-L201
Table Size
100mm×100mm
Guide Mechanism
Linear Guide
Motion Range
±50mm
Lead Mechanism
Ball Screw, Lead 2.0mm
Resolution Full/Half Step
4μm/2μm
Resolution Micro Step (1/20 div)
0.2μm
Maximum Speed
10mm/sec : Half 5kpps
Accumulated Lead Error
≦ 15μm/100mm
Repeatability
≦±0.5μm
Lost Motion
≦ 2μm
Straightness (Horizontal)
≦ 3μm/100mm
Straightness (Vertical)
≦ 3μm/100mm
Backlash
≦ 2μm
Moment Load Stiffness
0.05 arcsec/N cm
Load Capacity
196N (20kgf)
Material
Aluminum Alloy
Weight
3.5kg
Specification (Electrical)
5 Phase Stepper Motor
Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Connector
Vacuum D-Sub 9Pin (Accu-Glass Products: 9D-HVCP)
Control Electronics
Motor Controller
See the corresponded motor controller
Motor Driver
See the corresponded motor driver
Motor Cable
See the corresponded motor cable
Remarks and Features
●Vacuum-compatible automatic X stage with precision linear guides.
●Long stroke type.
●The feed system uses ball screws for superior durability.
●Uses vacuum-compatible 5-phase stepping motor.
