Vacuum Stages
MVXA10A-R102
Price
ASK
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Drawings fileDrawing For Download
Specification (Mechanical)
Model Number
MVXA10A-R102
Table Size
100mm×100mm
Guide Mechanism
Cross Roller Guide
Motion Range
±12.5mm
Lead Mechanism
Ground Screw, Lead 0.5mm
Resolution Full/Half Step
1μm/0.5μm
Resolution Micro Step (1/20 div)
0.05μm
Maximum Speed
2.5mm/sec : Half 5kpps
Accumulated Lead Error
≦ 8μm/25mm
Repeatability
≦±0.5μm
Lost Motion
≦ 1μm
Straightness (Horizontal)
≦ 1μm/25mm
Straightness (Vertical)
≦ 1μm/25mm
Backlash
≦ 0.5μm
Moment Load Stiffness
0.02 arcsec/N cm
Load Capacity
196N (20kgf)
Material
Aluminum Alloy
Weight
1.8kg
Specification (Electrical)
5 Phase Stepper Motor
Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72°
Connector
Vacuum D-Sub 9Pin (Accu-Glass Products: 9D-HVCP)
Control Electronics
Motor Controller
See the corresponded motor controller
Motor Driver
See the corresponded motor driver
Motor Cable
See the corresponded motor cable
Remarks and Features
●Vacuum-compatible motorized X stage with precision crossed roller guides.
●The feed system uses high-resolution ground Screw.
●Uses vacuum-compatible 5-phase stepping motor.
