Vacuum Swivel Stage(Goniometer Stage)
MVSA07A-RM02
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| Drawings file |
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| Drawing For Download |
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| Connect Fig File |
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Remarks and Features
Specification (Mechanical)
| Model Number | MVSA07A-RM02 |
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| Table Size | 70mm×70mm |
| Guide Mechanism | Cross-Roller Guide |
| Angular Range | ±10° |
| Lead Mechanism | Worm & Worm Wheel 1/300 |
| Resolution Full/Half Step | 0.0024°/0.0012° |
| Resolution Micro Step (1/20 div) | 0.00012° |
| Maximum Speed | 6°/sec |
| Work Distance | 96mm±0.2mm |
| Rotation Center Play | ≦φ0.05mm/±10° |
| Lost Motion | ≦0.006° |
| Backlash | ≦0.003° |
| Moment Load Stiffness | 0.09 arcsec/N・cm |
| Load Capacity | 49N (5kgf) |
| Material | Aluminum alloy |
| Weight | 0.97kg |
Specification (Electrical)
| Standard Motor | Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72° |
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| Standard Connector | Vacuum D-Sub 9Pin |
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| Lubricant Change Option | |
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| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
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| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
Vacuum Swivel Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
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- Control Electronics
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