Vacuum Swivel Stage(Goniometer Stage)
MVSA10A-RM01
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| Drawings file |
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| Drawing For Download |
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| Connect Fig File |
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Remarks and Features
Specification (Mechanical)
| Model Number | MVSA10A-RM01 |
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| Table Size | 100mm×100mm |
| Guide Mechanism | Cross-Roller Guide |
| Angular Range | ±10° |
| Lead Mechanism | Worm & Worm Wheel 1/428 |
| Resolution Full/Half Step | 0.00168°/0.00084° |
| Resolution Micro Step (1/20 div) | 0.000084° |
| Maximum Speed | 4.2°/sec |
| Work Distance | 134mm±0.2mm |
| Rotation Center Play | ≦φ0.05mm/±10° |
| Lost Motion | ≦0.005° |
| Backlash | ≦0.003° |
| Moment Load Stiffness | 0.02 arcsec/N・cm |
| Load Capacity | 68.6N (7kgf) |
| Material | Aluminum alloy |
| Weight | 2.6kg |
Specification (Electrical)
| Standard Motor | Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72° |
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| Standard Connector | Vacuum D-Sub 9Pin |
| Overhaul Price |
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| Lubricant Change Option | |
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| Clean Room Lubricant Change Price ("-C" at the end of model number) | |
| Vacuum Lubricant Change Price ("-V" at the end of model number) | |
| Motor Change Option | |
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| Same Size Motor Change Price | ~ |
| Different Size Motor Change Price | ~ |
Vacuum Swivel Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Product Comparing
- Control Electronics
- Accessories