Vacuum Swivel Stage(Goniometer Stage)
MVSA13A-RT01
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Remarks and Features
Specification (Mechanical)
Model Number | MVSA13A-RT01 |
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Table Size | 130mm×130mm |
Guide Mechanism | Cross-Roller Guide |
Angular Range | ± 10° |
Lead Mechanism | Worm & Worm Wheel 1/288 |
Resolution Full/Half Step | 0.0025°/0.00125° |
Resolution Micro Step (1/20 div) | 0.000125° |
Maximum Speed | 6.25°/sec |
Work Distance | 120mm±0.5mm |
Rotation Center Play | ≦φ0.05mm/± 10° |
Lost Motion | ≦0.01° |
Backlash | ≦0.006° |
Moment Load Stiffness | 0.02 arcsec/N・cm |
Load Capacity | 98N (10kgf) |
Material | Aluminum alloy |
Weight | 4.7kg |
Specification (Electrical)
Standard Motor | Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72° |
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Standard Connector | Vacuum D-Sub 9Pin |
Overhaul Price |
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~ |
Lubricant Change Option | |
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Clean Room Lubricant Change Price ("-C" at the end of model number) | |
Vacuum Lubricant Change Price ("-V" at the end of model number) |
Motor Change Option | |
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Same Size Motor Change Price | ~ |
Different Size Motor Change Price | ~ |
Vacuum Swivel Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Custom-made units
- Product Comparing
- Control Electronics
- Accessories