Stage type |
Stage model Number |
Setting
value(default:4)
|
Home position (origin) return method |
X Linear Stage |
XA16F-L2101 (-R) |
1 |
Home position return method is determined with zone (datum) sensor. |
XA16F-L2201 (-R) |
XA16F-L2301 (-R) |
XA20F-L2401 (-R) |
XA20F-L2501 (-R) |
SXA0530-R01 (-R) |
SXA0750-R01 (-R) |
SXA0775-R01 (-R) |
SXA1075-R01 (-R) |
Vertical Stage |
ZA04A-W101 |
7 or 8 |
Home position return method is determined with limit sensor. |
ZA10A-32F01 |
1 | Home position return method is determined with zone (datum) sensor. |
ZA16A-32F01 |
Rotation Stage |
RA04A-W01 |
7 or 8 |
Home position return method is determined with limit sensor. |