Backlash

< Motorized X , Z Linear Stage / Motorized Swivel (Tilt) Stage >

Linear Stage (X, XY, Z)
The backlash is defined as the remained value shown by the indicator after applying a force 1 kg to the same direction of the last displacement of stage with a push gauge and releasing it. For example, the indicator is attached to the edge of a table after the stage moves 5 mm to motor side from the original position. After the setting, the 1 kg force is applied to the same direction and released. The remained value indicator shows is the backlash.

Inspection Image

 

Swivel Stage (Goniometer)
The table is moved from the anti-motor side to the center and is stopped. The position is read with an auto collimator, and the position is used as a reference. The table is pushed with a force of 1 kg in the tangential direction of the arc, motor side direction, then the force is released. The value of the auto collimator is defined as the backlash for swivel stage.

Inspection Image

 

<Motorized Rotation Stage>

The table is rotated clockwise and stopped at an arbitrary angular position which is taken as an origin. Then, a 1kg force is applied tangentially in the clockwise direction from the external portion by means of a push gauge and the push gauge is released. The backlash is defined as the angular difference between the origin and the position where the table stops after releasing the force.

Inspection Image