< Motorized X , Z Linear Stage / Motorized Swivel (Tilt) Stage >
Linear Stage (X, XY, Z)
The backlash is defined as the remained value shown by the indicator after applying a force 1 kg to the same direction of the last displacement of stage with a push gauge and releasing it. For example, the indicator is attached to the edge of a table after the stage moves 5 mm to motor side from the original position. After the setting, the 1 kg force is applied to the same direction and released. The remained value indicator shows is the backlash. |
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Swivel Stage (Goniometer)
The table is moved from the anti-motor side to the center and is stopped. The position is read with an auto collimator, and the position is used as a reference. The table is pushed with a force of 1 kg in the tangential direction of the arc, motor side direction, then the force is released. The value of the auto collimator is defined as the backlash for swivel stage. |
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＜Motorized Rotation Stage＞
The table is rotated clockwise and stopped at an arbitrary angular position which is taken as an origin. Then, a 1kg force is applied tangentially in the clockwise direction from the external portion by means of a push gauge and the push gauge is released. The backlash is defined as the angular difference between the origin and the position where the table stops after releasing the force. |
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