Understanding X, XY Linear Stage

Understanding Specifications

YM07A-S3-CL
YM07A-S3-CL
Specifications Description
Model Number YM07A-S3-CL  1. Kohzu's significant alpha-numeric model numbers offer quick product insight.
Mirror Model Number YM07A-S3-RRR-CL  2. Mirror symmetry of standard stage...
Table Size 70mm×70mm  3. Table size refers to the stage's valid mounting table size.
Guide Mechanism Cross-Roller Guide 4. Type of guide mechanism used on this stage.
Motion Range  Coarce 13mm, Fine 0.3mm 5. Stage travel range in the positive and negative directions from it's centered or neutral position. Fine Pitch Positioner types will indicate total coarse and fine travel ranges respectively.
Straightness ≦2μm/13mm  6. Straightness is measured relative to mounting surface.
Minimum Readout Coarse 10μm/Scale, Fine 0.5μm/Scale 7. Minimum readout is the smallest measurable value of motion.
Moment Load Stiffness 0.2 arcsec/N・cm  8. Moment load stiffness is measured in a direction perpendicular to the motion axis.
Load Capacity (Horizontal) 53.9N(5.5kgf)  9. Maximum load capacity is for a horizontally orientated stage with load centered on top-plate.
Material Aluminum Alloy  10. Material specification is for stage's main body components only.
Finish Clear-Matte Anodizing 11. Surface finish type and color.
Weight  0.93kg  12. Stage weight includes all components depicted in product photograph.
Perpendicularity ≦20μm/13mm  13. Perpendicularity (or orthogonality) between motion axes in a dual-axis XY stage assembly.
Actuator Fine Pitch Positioner FPP03-13 (13mm) 14. Actuator model number and travel range.。
Price(JPY) ¥152,000  15. Catalog price in Japanese currency
Overhaul Price * ¥30,000 〜  16. Overhaul price in Japanese currency
Clean Room Lubricant Change Price ¥24,000  17. Clean Room Lubricant change Price in Japanese currency.
Vacuum Lubricant Change Price ¥24,000  18. Vacuum Lubricant change Price in Japanese currency.

* Parts price is not included overhaul price.。

* Micrometer is exempt overhaul.

 

Guide Mechanism Type

●Cross-Roller Bearing Guide

The cross-roller guide is a limited stroke linear and bending guide that consists of a roller race and rollers. The roller race has 90 degree V-shape surface and it is harden and precisely polished. It is not only had a polished precise surface but also precisely correct 90 degree. The cylindrical shaped rollers are inserted between two roller races and they are aligned alternately. When the stage is moved, these rollers are rolling smoothly at the same time with the same tension because the gap between roller race is correctly arranged and maintained for the same distance. There is no slipping, no stopping due to the effective contact. As one of the feature, it has highly rigid more than ball guide because it has a longer contact line. Figure-1

●Gothic Arc

Gothic arc is guide mechanism that is consist from the pseudo-cylindrical sliding surface and the ball (see fig-2). This sliding surface is processed into both of table and base of the stage, and finish in quench and grind. The ball is set between groove of sliding surface. The sliding surface touch the ball in each 4 point, then this point contact mechanism not likely to bring up differential slip. And the size of ball is used for pressurizing control, it bring decreasing of parts number. Figure-2

Standard & Mirror Symmetry , Vertical Configurations

Micrometer and clamp position can be customized to meet specific application requirements at no additional cost.

The bracket type vertical linear stage (-X1 type) has an X-axis stage customized to a stand type.

Vertical (Z-type) Configuration

Typically, to suppress any influence from the stage top face, the feed mechanism is mounted on the base of stage. If the stand type is used with this mounting configuration, a load is applied along the spring extension of the stage and the stage may drop due to gravity (as shown in the left part in the right figure). Bracket type vertical linear stage may solve this problem by changing the position of micrometer holder.(see the right part in the right figure).

vertical-type

 

Micrometer Side-Mount

S1 S1-R
S1Z S1Z-R

 

Micrometer Center-Mount

C1 C1-R
C1Z C1Z-R

●XY Assembly list

Model Number Lower Axis Stage Upper Axis Stage Assembly Configuration
-NNN (no mark) Standard (Right Hand) Standard (Right Hand) Standard Assembly
-NNR Standard (Right Hand) Standard (Right Hand) Reversed Assembly
-NRN Standard (Right Hand) Mirror Symmetry (Left Hand) Standard Assembly
-NRR Standard (Right Hand) Mirror Symmetry (Left Hand) Reversed Assembly
-RNN Mirror Symmetry (Left Hand) Standard (Right Hand) Standard Assembly
-RNR Mirror Symmetry (Left Hand) Standard (Right Hand) Reversed Assembly
-RRN Mirror Symmetry (Left Hand) Mirror Symmetry (Left Hand) Standard Assembly
-RRR Mirror Symmetry (Left Hand) Mirror Symmetry (Left Hand) Reversed Assembly

 

Micrometer Side-Mount

NNN NNR NRN
NRR RNN RNR
RRN RRR  

Micrometer Center-Mount

NNN NRR RNN
RRR    

●Vertical (Z-type) Configurations

Micrometer Side-Mount

NZN NZR NZRN
NZRR RZN RZR
RZRN RZRR ZNN
ZNR ZRN ZRR
ZRNN ZRNR ZRRN
ZRRR ZNN ZZR
ZZRN ZZRR ZRZN
ZRZR ZRZRN ZRZRR

 

Micrometer Center-Mount

RZRN RZR ZNR
NZRN NZR ZRR
ZNN ZRNN ZRNR
ZRN ZRRN ZRRR