|Positioning stage equipped with linear scale provides higher accuracy than standard stage. Especially, accuracy of lost motion and repeatability should be improved.
And, we supply the feedback cable as an option which used for transmitting the incremental signal of linear scale into the motor controller.
|Mount image||Model||Stage Type|
X / XY Linear (X/ XY)
|ZA Series||Vertical Linear|
|SA Series||Swivel (Goniometer)|
Scale / Encoder
- Actual value
- Positioning Stages
- Vacuum Stages
- Control Electronics
- Inspection System