|The components required to connect Kohzu vacuum-compatible stages and SC controllers are:
1. Stage-to-feedthrough cable
2. Feedthrough-to-controller cable
3. Electrical feedthrough (Hermetically sealed)
|1. Vacuum Compatible Cable||HVB-R9-192SC||0.48m(19"inch)||Teflon Ribbon cable assembly with female sockets &DAP(glass-filled dyiathilate).|
|KAP-R9-192SC||0.48m(19"inch)||Kapton cable assembly with female sockets & PEEK(polyetheretherketone).|
|2. Motor Cable||CD09A28-030||3m (118"inch)||Motor cable for connecting between 9 Pin D-Type and motor controller (SC-210, SC-410).|
|3. Feedthrough||9D-275||Flange mounted electrical feedthroughs are fitted with D-Sub male interface on both vacuum and air sides. Note that pins are straight-through design, so typical pin assignment will be mirrored.|
|In addition to the above mentioned connectivity accessories,
Kohzu can also provide vacuum compatible flying-lead cables(up to 2m in length) and various wiring-block terminals.
Contact us for more information.
* previous type color is orange.
Wiring of Vacuum Stage
- Actual value
- Inspection System
- Positioning Stages
- Vacuum Stages
- Control Electronics