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Technology
» Inspection System
Inspection System
(Click the titles link to each technical information)
Inspection System
Positioning Stages
Manual Stages
Common Features
X/XY Stage
Z Stage
Rotation Stage
Swivel (Tilt) Stage
Motorized Stages
Common Features
X/XY Stage
Z Stage
Rotation Stage
Swivel (Tilt) Stage
Thin Stage
User Option
Encoder
Other Customization
Motorized Stage Option
Vacuum Stages
Common Features
Wiring of Vacuum Stage
Inspection System
Accumulated Lead Error
Repeatability
Lost Motion
Straightness / Verticality
Backlash
Moment Load Stiffness
Rotation Center Displacement
Work Distance
Load Capacity
Rotation Stage
Actual value
Control Electronics
Torque Specification of Stepper Motor
Non default Controller Setting
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Positioning Stage
Control Electronics
Vacuum Stage
