How much vacuum pressure can you reach?
It is impossible to warrant an actual vacuum pressure because, it is depend on many conditions: a chamber volume, material of content, surface area, exhaust rate, conductance and so on. In addition, the condition is dramatically changed by with or without a motor driving.
In typically, a required vacuum pressure rate is calculated by outgas rate（Pa・m3/sec）.
Please, refer to our link for the outgas rate of Kohzu vacuum stage.
For reference, if you have Kohzu vacuum stage in a typical condition for middle or high vacuum condition. You can reach the vacuum pressure 1×10-3Pa easily. It can be reached to 1×10-5Pa with our vacuum stage in a condition.
Note: MV series are not suitable for baking.
- Positioning Stages
- Vacuum Stages
- Control Electronics
- Inspection System