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Catalogs
General Catalog Vol.23
This is a general catalog that includes introductions to small positioning stages, control controllers, and large custom-made equipment.
PDF (32.32MB)
Product Guide
This booklet summarizes Kohzu Precision's product lineup and features.
PDF (1.63MB)
Example of high precision positioning stage used in semiconductor manufacturing process
This flyer summarizes examples of our stage applications in the front-end and back-end phases of the process.
PDF (7.48MB)
Ultra High Precision
6 Axis Alignment Stage
The parallel link mechanism using a double wedge system for the drive unit makes it possible to drive elevation and tilt, which had to be added separately for conventional RST aligners!
PDF (2.18MB)
Ultra High Precision
Alignment Stage
RST Aligner
This is an alignment stage that can be driven in 3 axes (XY, Θ). It has a structure that can flexibly accommodate large-diameter through-holes and custom orders, so please feel free to contact us for more information.
PDF (2.4MB)
Smart Alignment
Introduction of 3-DOF XYθ thin type alignment stages and compact rotation stages with ball screw drive.
PDF (2.12MB)
High precision 300mm stroke XY Linear stage
XY linear stage suitable for positioning of Φ300mm wafer. The wide type X stage enables high-precision positioning in the XY plane. Flexible support for cable bearers, linear scale mounting, motor changes, etc.
PDF (1.71MB)
Motorized rotation stage for high precision alignment
Newly released 160 mm square ball screw-driven tangent bar rotation stage. Ideal for alignment of wafers and other substrates.
PDF (1.69MB)
High load capacity Z stage
The Z-stage achieves low height, long stroke, and high load capacity all at once.
PDF (913KB)
High speed drive Z stage
This Z-stage enables high speeds thanks to belt drive.
PDF (871KB)
High Load Capacity 6 axis Stages
This flyer is a collection of the most rigid stages among 6-axis stages. Ideal for semiconductor current-carrying inspection.
PDF (1.88MB)
KOHZU
6 Axis Manipulator Collection
Introduction of 6-axis manipulators consisting of KOHZU's small positioning stages. We also offer customization to suit your application.
PDF (5.48MB)
Automatic Z Stage Feature
This page introduces the different types of motorized Z-stages! Also, custom case studies are introduced!
PDF (8.19MB)
Ball Screw Drive Swivel 100mmx100mm
In addition to 50mmx50mm and 70mmx70mm, “100mmx100mm” size has been added to the lineup! Please consider this new size, which is more durable, has higher resolution, and is lighter than the existing models.
PDF (1.5MB)
Surface Profilometry Measurement System
Dyvoce
This system measures and analyzes the SORI amount of wafers and the shapes of substrates and components using a laser displacement meter matched to the workpiece.
PDF (0.7MB)
Image Stabilization Simulator
TSS Series
A CIPA standard-certified vibration reproduction stage for verifying the image stabilization function of cameras.
PDF (1.2MB)
Instruction Manuals
Motor Controller KOSMOS Series
| Product Name | Remarks |
|---|---|
| CRUX-D/INCOM PDF | Rev 1.02 Updated 30 Sep 2020 (PDF 5.70MB) |
| ARIES/LYNX/PYXIS PDF | Rev.1.43 Updated 16 Aug 2021 (PDF 3.89MB) |
| TITAN-AⅡ PDF | Rev.1.11 Updated 01 Oct 2014 (PDF 806KB) |
| TITAN-DⅡF PDF | Rev.2.00 Updated 11 May 2015 (PDF 801KB) |
| Chamonix PDF | Rev.1.2.3 Updated 13 Mar 2020 (PDF 6.3MB) |
|
CRUX/CRUX-A (previous product) PDF |
Rev.1.37 Updated 27 Apr 2020 (PDF 5.49MB) |
Motor Driver Wiring Diagrams
| Product Name | Remarks |
|---|---|
|
MD-551F,MD-55F,MD-255F MD-355F,MD-455F PDF |
Motor Cable CA**VL,CB**VL,RCA**VL,RCB**VL 10 Nov 2015 (PDF 376KB) |
Motor Driver
Application
| Product Name | Controller | Communication Format | Download (compressed file) | Remarks |
|---|---|---|---|---|
| Motor controller control “Chamonix” (free of charge) |
KOSMOS series (ARIES and CRUX) SC series |
RS-232C USB Ethernet (TCP/IP) |
Download | Ver.1.2.4 (ZIP 37.1MB) |
Sample Programs
| Product Name | Description | Download (compressed file) | Remarks |
|---|---|---|---|
| Motor controller Control sample code |
RS-232C connection control TCP/IP connection control Visual Basic, C# | Download | ZIP 690KB |
Wiring Diagram
Wiring between Stage and Driver
Refer to the PDF link below when connecting a stage to a motor driver or a controller manufactured by another company.
Cable Wiring Diagrams
Cables for Controllers (TITAN/CRUX/ARIES/LYNX)
| Product Type | Model (** denotes length) |
|---|---|
| Motor Cable for TITAN/CRUX 5-lead Motor Stage |
CA15**, RCA15** CB15**, RCB15** PDF |
| Motor Cable for TITAN/CRUX 10-lead Motor Stage (former product) |
CA15**A CB15**A PDF |
| Control Cable for ARIES/LYNX | CPS*** (old product) PDF |
| Feedback Cable for ARIES/LYNX (Make to Order) | CM20**ENC PDF |
| Feedback Cable for Customer-prepared Controllers (built-to-order) | CENC-**F PDF |
Driver cable
| Product Type | Model (** denotes length) |
|---|---|
| Driver Cable for 5-lead Motor Stage |
CA**VL, RCA**VL CB**VL, RCB**VL PDF |
| Driver Cable for 10-lead Motor Stage (former product) |
CA**, RCA** CB**, RCB** PDF |
Cables for SC Controllers
| Product Type | Connector Type | Model (** indicates length) |
|---|---|---|
| Cable for SC-210/410 (Old Product) |
Rectangular Connector For Stage |
CA28**, RCA28** PDF |
| Circular Connector For Stage |
CB28**, RCB28** PDF | |
| Cable for SC-021 (former product) |
Rectangular Connector For Stage |
CA13**, RCA13** PDF |
| Circular Connector For Stage |
CB13**, RCB13** PDF | |
| Feedback cable for SC-210/SC-410 (former product) |
Rectangular Connector For Stage |
CA28**ENC(-△△) (**: cable length (m) at stage side) ((-△△): cable length (m) at encoder side) (No indication if same as stage side) PDF |
| Circular Connector For Stage |
CB28**ENC(-△△) (** indicates cable length at stage side (m)) ((-△△) indicates cable length at encoder side (m)) (No indication if same as stage side) PDF | |
| Feedback cable for SC-021 (former product) |
CENC-**F PDF | |