Vacuum Z Stage(Vertical Stage)

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MVZA07A-W2C02 70mm×70mm ±2.5mm 49N (5kgf)
MVZA07A-X103 70mm×70mm ±10mm 49N (5kgf)
MVZA10A-W202 100mm×100mm ±7mm 98N (10kgf)
MVZA16A-W2C01 160mm×160mm ± 8mm 196N (20kgf)
Vacuum Z Stage