Vacuum Z Stage(Vertical Stage)
MVZA16A-W2C01
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Remarks and Features
Specification (Mechanical)
Model Number | MVZA16A-W2C01 |
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Table Size | 160mm×160mm |
Guide Mechanism | Cross-Roller Guide |
Motion Range | ± 8mm |
Lead Mechanism | 1/4-Wedge, Ball Screw, Lead 1.0mm |
Resolution Full/Half Step | 0.5μm/0.25μm |
Resolution Micro Step (1/20 div) | 0.025μm |
Maximum Speed | 1.25mm/sec |
Repeatability | ≦±0.5μm |
Lost Motion | ≦0.5μm |
Verticalness | ≦ 10μm/16mm |
Load Capacity | 196N (20kgf) |
Material | Aluminum Alloy |
Weight | 7.2kg |
Specification (Electrical)
Standard Motor | Five(5)-phase stepper vacuum motor, Phase Current 1.4A, Basic Step Angle 0.72° |
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Standard Connector | Vacuum D-Sub 9Pin |
Overhaul Price |
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~ |
Lubricant Change Option | |
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Clean Room Lubricant Change Price ("-C" at the end of model number) | |
Vacuum Lubricant Change Price ("-V" at the end of model number) |
Motor Change Option | |
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Same Size Motor Change Price | ~ |
Different Size Motor Change Price | ~ |
Vacuum Z Stage
- Precision Positioning Stages
- Vacuum Stages
- Compact 6-Axes Manipulator
- Laser measurement system
- Blur Vibration Simulator
- System Products / Experimental
- Custom-made units
- Product Comparing
- Control Electronics
- Accessories