| No. 1 |
Motorized X Stages |
Average of actual measurement value |
 |
| No. 2 |
Motorized Vertical Linear Stages |
Average of actual measurement value |
|
| No. 3 |
Motorized Rotation Stages |
Average of actual measurement value |
|
| No. 4 |
Motorized Swivel (Tilt) Stages |
Average of actual measurement value |
|
| No. 5 |
Motorized XYθ Stages |
Average of actual measurement value |
|
