No. 1 |
Motorized X Stages |
Average of actual measurement value |
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No. 2 |
Motorized Vertical Linear Stages |
Average of actual measurement value |
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No. 3 |
Motorized Rotation Stages |
Average of actual measurement value |
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No. 4 |
Motorized Swivel (Tilt) Stages |
Average of actual measurement value |
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No. 5 |
Motorized XYθ Stages |
Average of actual measurement value |
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