Positioning stage equipped with linear scale provides higher accuracy than standard stage. Especially, accuracy of lost motion and repeatability should be improved.
If you need more quickly and higher accuracy positioning, please contact our sales department.
* There are some cases where a positioning stage with linear scale does not reach the maximum speed depending on the control resolution. Check the necessary resolution and maximum speed preliminarily.
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- Actual value
- Inspection System
- Positioning Stages
- Vacuum Stages
- Control Electronics