Manual X/XY Stage

XM10F-C3-CL

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Remarks and Features

Specification (Mechanical)
Model NumberXM10F-C3-CL
Mirror Model NumberXM10F-C3-R-CL
Table Size100mm×100mm
Guide MechanismCross-Roller Guide
Motion RangeCoarse 13mm, Fine 0.3mm
Straightness≦1.5μm/13mm
Minimum ReadoutCoarse 10μm/div, Fine 0.5μm/div
Moment Load Stiffness0.04 arcsec/N・cm
Load Capacity196N (20kgf)
MaterialSteel
FinishingNickel Plating
Weight 1.6kg
Perpendicularity-
ActuatorFine Pitch Positioner FPP03-13(13mm)
Overhaul Price
~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number)
Motor Change Option
Same Size Motor Change Price ~
Different Size Motor Change Price ~
*The Motor cost is not included on Motor Change Price
 Accessory
 Accessory See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

Information

Lubricant exchange is not available for actuators on stages.

Link to Technical informaiton of X/XY Stage

Manual X/XY Stage