Motorized X/XY Stage

CXA20F-L24

Price(JPY)
¥ 1,300,000
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Remarks and Features

Please, prepare the cable for 5 lead motor. 
Specification (Mechanical)
Model NumberCXA20F-L24
Mirror Model NumberCXA20F-L24-R
Table Size218mm×200mm
Guide MechanismLinear Guide
Motion Range±200mm
Lead MechanismBall Screw, Lead 5.0mm
Resolution　Full/Half Step10μm/5μm
Resolution　Micro Step (1/20 div)0.5μm
Maximum Speed100mm/sec
Accumulated Lead Error≦30μm/400mm
Repeatability≦±0.5μm
Lost Motion≦10μm
Straightness (Horizontal)≦6μm/400mm
Straightness (Vertical)≦6μm/400mm
Backlash≦2μm
Moment Load Stiffness0.003 arcsec/N･cm
Load Capacity980N (100kgf)
MaterialSteel (Table: Aluminum Alloy)
FinishingMatt Black
Weight40kg
Specification (Electrical)
Standard Motor5 phase stepper motor (Oriental Motor: C087Q-9215P)
Motor Shaft Diameter:Φ8mm Conformance option handle: B type
Standard Connector20Pin Rectangular (Hirose: PC-1620, P-1620A-STA)
Sensor ModelF-104(LIMIT), F-105(HOME)
Overhaul Price
¥ 96,000~
*Additional parts cost is not included on Overhaul Price
Lubricant Change Option
Clean Room Lubricant Change Price ("-C" at the end of model number)
Vacuum Lubricant Change Price ("-V" at the end of model number) ¥ 66,000
Motor Change Option
Same Size Motor Change Price ¥ 15,000~
Different Size Motor Change Price ¥ 36,000~
*The Motor cost is not included on Motor Change Price
　Control Electronics
　Motor Controller　See the corresponded motor controller
　Motor Driver　See the corresponded motor driver
　Motor Cable　See the corresponded motor cable
　Accessory
　Accessory　See the corresponded accessory as like spacer or bracket
We appreciate the product customizing. Contact us for further information.

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Motorized X/XY Stage